Semiconductor device

ABSTRACT

The present invention enhances voltage conversion efficiency of a semiconductor device. In a non-isolated DC-DC converter that includes a high-side switch power MOSFET and a low-side switch power MOSFET, which are series-connected, the high-side switch power MOSFET and driver circuits for driving the high-side and low-side switch power MOSFETs are formed within one semiconductor chip, whereas the low-side switch power MOSFET is formed in another semiconductor chip. The two semiconductor chips are sealed in a single package.

CROSS-REFERENCE TO RELATED APPLICATION

The present application claims priority from Japanese patent application No. 2004-008779 filed on Jan. 16, 2004, the content of which is hereby incorporated by reference into this application.

BACKGROUND OF THE INVENTION

The present invention relates to a semiconductor device technology, and more particularly to a technology that is applicable to a semiconductor device having a power supply circuit.

A DC-DC converter, which is widely used as a power supply circuit, is formed by series-connecting a high-side switch power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) to a low-side switch power MOSFET. The high-side switch power MOSFET has a switch function for DC-DC converter control. The low-side switch power MOSFET has a switch function for synchronous rectification. These two power MOSFETs alternately turn ON/OFF in synchronism with each other to effect power supply voltage conversion.

The DC-DC converter described above is disclosed, for instance, by Japanese Unexamined Patent Publication No. 2002-217416. The technology disclosed by this patent forms a high-side switch with a horizontal power MOSFET and a low-side switch with a vertical power MOSFET.

Further, the technology disclosed, for instance, by Japanese Unexamined Patent Publication No. 2001-25239 uses a resistor and capacitor to reduce noise that is a problem with a DC-DC converter when it is fabricated as a single chip including a control circuit, driver circuit, and power MOSFET.

SUMMARY OF THE INVENTION

However, as regards DC-DC converters that are used as a power supply circuit for a desktop or notebook personal computer, server, game machine, or the like, low-voltage output, large-current output, high-speed response, and miniaturization are demanded in line with a request for the use of a large-current drive CPU (Central Processing Unit) or the like and input/output capacity reduction of a choke coil, which serves as a passive part. To meet such a demand, it is important to devise a method for acquiring a DC-DC converter that permits the use of a large current and high frequency and exhibits high voltage conversion efficiency.

An object of the present invention is to provide a technology for improving the voltage conversion efficiency of a semiconductor device.

Another object of the present invention is to provide a technology for miniaturizing a semiconductor device package.

Still another object of the present invention is to provide a technology for improving the heat radiation capability of a semiconductor device.

The foregoing and other objects and features of the present invention will be apparent from the following, more particular description of the present invention, as illustrated in the accompanying drawings.

A representative aspect of the present invention will now be briefly described.

The present invention is a single semiconductor chip that incorporates a high-side switch power transistor and a drive circuit for driving the high-side switch power transistor.

The advantage provided by a representative aspect of the present invention will now be briefly described.

Since a high-side switch power transistor and a drive circuit for driving the high-side switch power transistor are incorporated into a single semiconductor chip, it is possible to reduce the parasitic wiring inductance, which affects the voltage conversion efficiency to a greater extent than any other wiring path inductance, until it is ignorable. As a result, the present invention improves the voltage conversion efficiency of a semiconductor device.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a circuit diagram illustrating an example of a semiconductor device according to one embodiment of the present invention;

FIG. 2 is a circuit diagram illustrating an example of a drive circuit for the semiconductor device shown in FIG. 1;

FIG. 3 is a typical timing diagram of the semiconductor device shown in FIG. 1;

FIG. 4 is an equivalent circuit diagram illustrating inductance components that are parasitic on a semiconductor device according to the present invention;

FIG. 5 illustrates the relationship between the loss and inductance components parasitic on a semiconductor device according to the present invention;

FIG. 6 illustrates a circuit operation of a semiconductor device according to the present invention;

FIG. 7 illustrates a device cross-section prevailing during the circuit operation shown in FIG. 6;

FIG. 8 illustrates a typical configuration of the semiconductor device shown in FIG. 1;

FIG. 9 illustrates the configuration of a semiconductor device according to the present invention;

FIG. 10 illustrates the configuration of another semiconductor device according to the present invention;

FIG. 11 illustrates the configuration of another semiconductor device according to the present invention;

FIG. 12 illustrates the configuration of still another semiconductor device according to the present invention;

FIG. 13 illustrates parameter comparisons of the semiconductor device shown in FIG. 8 and the semiconductor devices shown in FIGS. 9 through 12;

FIG. 14 is a plan view illustrating a typical package configuration of the semiconductor device shown in FIG. 1;

FIG. 15 shows cross section Y1-Y1 of FIG. 14;

FIG. 16 shows an essential part cross section of a first semiconductor chip of a semiconductor device according to one embodiment of the present invention;

FIG. 17 shows an essential part cross section of a second semiconductor chip of a semiconductor device according to one embodiment of the present invention;

FIG. 18 is a plan view illustrating, as an example, how a semiconductor device according to one embodiment of the present invention is mounted;

FIG. 19 is a side view of FIG. 18;

FIG. 20 is a plan view illustrating a typical package configuration of a semiconductor device according to another embodiment of the present invention;

FIG. 21 shows cross section Y1-Y1 of FIG. 20;

FIG. 22 is a plan view illustrating a typical package configuration of a semiconductor device according to another embodiment of the present invention;

FIG. 23 shows cross section Y1-Y1 of FIG. 22;

FIG. 24 is a cross-sectional view illustrating a typical package configuration of a semiconductor device according to another embodiment of the present invention;

FIG. 25 is a cross-sectional view illustrating the semiconductor device that is shown in FIG. 24 and provided with a heat sink;

FIG. 26 is a plan view illustrating a typical package configuration of a semiconductor device according to another embodiment of the present invention;

FIG. 27 shows cross section Y1-Y1 of FIG. 26;

FIG. 28 is a plan view illustrating a typical package configuration of a semiconductor device according to still another embodiment of the present invention;

FIG. 29 shows cross section Y1-Y1 of FIG. 28;

FIG. 30 is a plan view illustrating the upper surface of a package for the semiconductor device shown in FIG. 28; and

FIG. 31 is a plan view that illustrates the upper surface of a package for a semiconductor device in order to indicate a typical modified version of FIG. 30.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The embodiments of the present invention will be described while dividing one embodiment into a plurality of sections or a plurality of embodiments if necessary for the sake of convenience. It is noted, however, that they are not irrelevant to one another but one is the modification, detail, additional description of a part of or all of the others unless defined otherwise. Further, in the following embodiments, unless the number of components thereof and the like (including the number, numerical values, quantities, ranges, and the like) are referred to or unless particularly the number of components and the like are designated or obviously specified by the specific numbers, they should not be limited to the specific numbers but may be not less than or not more than the specific numbers. Moreover, it goes without saying that these components (including constituent steps and the like) are not necessarily essential unless they are specially designated or obviously considered to be essential in principle in the following embodiments. Likewise, in the following embodiments, if referring to the shapes, positional relationships, and the like of the components and the like, they include those substantially approximate or similar to the shapes and the like. The same thing is true for the numerical values and ranges thereof stated above. Furthermore, components having the same functions are denoted by the same reference numerals and no repetitive description will be given thereto throughout all the drawings. The embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

First Embodiment

A semiconductor device according to a first embodiment of the present invention is a non-isolated DC-DC converter for use in a power supply circuit that is used, for instance, with a desktop personal computer, notebook personal computer, server, or game machine. FIG. 1 is a circuit diagram that shows an example of a non-isolated DC-DC converter 1. The non-isolated DC-DC converter 1 includes a control circuit 2, driver circuits 3 a, 3 b, power MOSFET Q1 (first field effect transistor), power MOSFET Q2 (second field effect transistor), a coil L1, and a capacitor C1. These elements are mounted on a wiring substrate and electrically interconnected through wiring on the wiring substrate. The reference numeral 4 in FIG. 1 denotes a CPU (Central Processing Unit), DSP (Digital Signal Processor), or other load circuit for the above-mentioned desktop personal computer, notebook personal computer, server, game machine, or the like. The reference numerals ET1 and ET2 denote terminals.

The control circuit 2 controls the switch-ON width of power MOSFETs Q1 and Q2. This control circuit 2 is packaged separately from power MOSFETs Q1 and Q2. The output of the control circuit 2 is electrically connected to the inputs of a driver circuit 3 a (first control circuit) and a driver circuit 3 b (second control circuit) The driver circuits 3 a and 3 b control the gate electrodes of power MOSFETs Q1 and Q2, respectively. The driver circuits 3 a and 3 b are formed, for instance, by CMOS inverter circuits. FIG. 2 is a circuit diagram that shows an example of driver circuit 3 a. The driver circuit 3 a is configured so that a p-channel power MOSFET Q3 and an n-channel power MOSFET Q4 are complementarily series-connected. In FIG. 2, the symbols D and S represent a drain and a source, respectively.

The outputs of driver circuits 3 a and 3 b are electrically connected to the gate electrodes of power MOSFETs Q1 and Q2, respectively. The power MOSFETs Q1 and Q2 are series-connected between a terminal ET1 (first power supply terminal) to which an input voltage (first power supply potential) Vin is applied and a terminal (second power supply terminal) to which a reference potential (second power supply potential) GND is supplied. For example, the input voltage Vin is approximately 5 to 10 V or approximately 12 V. The reference potential GND is, for instance, a ground potential and approximately 0 (zero) V. The operating frequency (the number of cycles per second at which the power MOSFET Q1/Q2 turns ON/OFF) for the non-isolated DC-DC converter 1 is, for example, 1 MHz or so.

The power MOSFET Q1 is a power transistor for a high-side switch (high potential side: first operating voltage). It has a switch function for storing energy in a coil L1 that supplies power to the output (input of a load circuit 4) of the non-isolated DC-DC converter 1. The power MOSFET Q1 is formed by a horizontal power MOSFET. As regards a high-side switch power MOSFET, it is known that the higher the operating frequency of the non-isolated DC-DC converter 1, the greater the switching loss (turn-ON loss and turn-OFF loss) looks. When a horizontal power MOSFET is used as a high-side switch power MOSFET, the gate region per unit cell area can be rendered smaller than when a vertical power MOSFET is used. Further, the joint area between the gate electrode and drain region drift layer can be reduced. In other words, the switching loss can be reduced because the gate-drain capacity can be decreased. Consequently, when a high-side switch power MOSFET Q1 is formed by a horizontal power MOSFET, the gate-drain capacity can be reduced. As a result, the voltage conversion efficiency can be increased even when the operating frequency of the non-isolated DC-DC converter 1 is high.

The power MOSFET Q2 is a power transistor for a low-side switch (low potential side: second operating voltage). It is a rectification transistor for the non-isolated DC-DC converter 1. It has a function for reducing the transistor resistance and achieving rectification in synchronism with the frequency fed from the control circuit 2. It is formed by a vertical power MOSFET. The reason is that the ON time of the low-side switch power MOSFET Q2 is longer than that of the high-side switch power MOSFET Q1. Therefore, the ON-resistance-induced loss looks greater than the switching loss. However, when a vertical power MOSFET is used, the channel width per unit area is greater than when a horizontal power MOSFET is used. Consequently, the ON resistance can be reduced by the use of a vertical power MOSFET. In other words, when the low-side switch power MOSFET Q2 is formed by a vertical power MOSFET, the ON resistance can be reduced. As a result, the voltage conversion efficiency can be increased even when there is an increase in the current flow to the non-isolated DC-DC converter 1.

Output wiring is electrically connected to the wiring between the source of the power MOSFET Q1 and the drain of the power MOSFET Q2. The output wiring is electrically connected to the coil L1. After the coil L1, the capacitor C1 is electrically connected between the output wiring and the terminal for supplying the reference potential GND. Before the coil L1, a Schottky barrier diode (SBD), which has a lower forward voltage Vf than a parasitic diode D1 for the power MOSFET Q2, may be connected between the output wiring and the terminal for supplying the reference potential GND and in parallel to the power MOSFET Q2. In this instance, the anode of the Schottky barrier diode is electrically connected to the reference potential supply terminal with the cathode electrically connected to the output wiring. This reduces the dead time voltage drop that occurs when the power MOSFET Q2 turns OFF, thereby increasing the speed of the subsequent pulse waveform rise.

In the above circuitry, the power MOSFETs Q1 and Q2 alternately turn ON/OFF in synchronism with each other in order to effect power supply voltage conversion. More specifically, a current 11 (first current) flows when the high-side switch power MOSFET Q1 is ON and a current 12 flows due to the counter electromotive force of the coil L1 when the high-side switch power MOSFET Q1 is OFF. When the low-side switch power MOSFET Q2 is turned ON while the current 12 flows, the voltage drop can be reduced. FIG. 3 is a typical timing diagram of the non-isolated DC-DC converter 1. As mentioned earlier, the ON time of the low-side switch power MOSFET Q2 is longer than that of the high-side switch power MOSFET Q1. The symbol Ton denotes a pulse width prevailing when high-side switch power MOSFET Q1 is ON. The symbol T denotes an interpulse period. The current 11 is a large current, for example, 20A or so.

In recent years, the drive current for the non-isolated DC-DC converter 1 has increased with an increase in the drive current for the load circuit 4. Further, the operating frequency of the non-isolated DC-DC converter 1 has increased as it is requested that the non-isolated DC-DC converter 1 be miniaturized. Non-isolated DC-DC converter miniaturization is requested because reduction of the overall size of semiconductor devices is requested. In addition, the distance between the non-isolated DC-DC converter 1 and load circuit 4 can be reduced when the non-isolated DC-DC converter 1 is miniaturized, and such distance reduction is ideal for immediately supplying a large current to the load circuit 4. Meanwhile, when the operating frequency of the non-isolated DC-DC converter 1 is increased, it is possible to decrease the number of unit elements for the coil L1 and capacitor C1 and reduce the sizes of the coil L1 and capacitor C1.

The inventors of the present invention have found that when the current and frequency are increased as described above, the voltage conversion efficiency of the non-isolated DC-DC converter 50, which is shown in FIG. 4, decreases due to the influence of inductance LsH, which is parasitic on the source side of the high-side switch power MOSFET Q1. FIG. 4 shows an equivalent circuit, which illustrates inductance components that are parasitic on the non-isolated DC-DC converter 50. The symbols LdH, LgH, LsH, LdL, LgL, and LsL denote inductances that are parasitic on the packages of the power MOSFETs Q1 and Q2, printed wiring board wires, and the like. The symbol VgH denotes a gate voltage that is used to turn ON the power MOSFET Q1. The symbol VgL denotes a gate voltage that is used to turn ON the power MOSFET Q2.

FIG. 5 shows the results of a component analysis of inductance LsH and loss. The dotted areas represent the turn-ON loss of the high-side switch power MOSFET. The hatched areas represent the turn-OFF loss of the high-side switch power MOSFET. The unshaded areas represent the loss of the low-side switch power MOSFET. When parasitic inductance LsH increases, the turn-ON loss and turn-OFF loss (turn-ON loss in particular) of the high-side switch power MOSFET Q1 significantly increase, thereby decreasing the voltage conversion efficiency of the non-isolated DC-DC converter 50. The turn-ON loss and turn-OFF loss are proportional to the frequency and output current. Therefore, the loss component increases with an increase in the current and frequency of the non-isolated DC-DC converter 50 as described above.

When parasitic inductance LsH increases, the turn-ON and turn-OFF operations delay, thereby increasing the turn-ON loss and turn-OFF loss. The reason for such a phenomenon will now be described. FIG. 6 illustrates a circuit operation of the non-isolated DC-DC converter 50. FIG. 7 illustrates a device cross-section prevailing during a circuit operation.

When the gate voltage of the high-side switch power MOSFET Q1 exceeds a threshold voltage so that the current I1 (first current) begins to flow from the drain region DR1 of the power MOSFET Q1 to the source region SR1, the parasitic inductance LsH gives rise to a counter electromotive force of LsH×di/dt. The source potential of the high-side switch power MOSFET Q1 then becomes higher than at point A shown in FIGS. 6 and 7. The gate voltage of the power MOSFET Q1 is given by a power supply (control circuit 2 in reality) with reference to point A. Therefore, the voltage applied to the gate electrode G1-source region SR1 of the high-side switch power MOSFET Q1 is lower than the gate voltage VgH. The loss of the current II then arises because the channel resistance RI of the high-side switch power MOSFET Q1 does not sufficiently decrease. In other words, the turn-ON time increases. The turn-ON loss and turn-OFF loss increase with an increase in the power and frequency as described earlier because a counter electromotive force (LsH×di/dt) increases due to an increase in the power and frequency.

Meanwhile, the low-side switch power MOSFET Q2 is configured so as not suffer from the above switching loss. When the high-side switch power MOSFET Q1 turns OFF, a current 121 (second current) flows from the reference potential GND to a drain region DR2 of the power MOSFET Q2 via the parasitic diode D1, which is connected in parallel to the low-side switch power MOSFET Q2. When the gate voltage VgH is applied to the gate electrode G2 of the low-side power MOSFET Q2 for turn-ON, a current 122 (third current) flows from the source region SR2 of power MOSFET Q2 to the drain region DR2 via the channel region of power MOSFET Q2. However, the current 121, which is mentioned above, flows prior to the current 122. Further, the electrical current change per unit time is small when the current 122 flows. The counter electromotive force induced by the parasitic inductance LsL is small and ignorable. Therefore, no substantial loss occurs.

In the first embodiment, the driver circuits 3 a and 3 b and the high-side switch power MOSFET Q1 are formed into a single semiconductor chip (first semiconductor chip) 5 a as shown in FIG. 8 for the main purpose of avoiding a problem in which the voltage conversion efficiency of the non-isolated DC-DC converter decreases due to the influence of the inductance LsH that is parasitic on the source side of the above-mentioned high-side switch power MOSFET Q1. Joints made with bonding wires can then be connected with metal wires within the semiconductor chip 5 a. Therefore, the parasitic inductance LsH, which affects the voltage conversion efficiency to a greater extent than any other wiring inductance, can be reduced until it is ignorable. Consequently, the switching loss of the high-side switch power MOSFET Q1 (turn-ON loss and turn-OFF loss) can be reduced. As a result, it is possible to increase the voltage conversion efficiency of the non-isolated DC-DC converter 1. For the purpose of reducing the parasitic inductance LsH, the high-side switch driver circuit 3 a and power MOSFET Q1 should be formed within the same semiconductor chip 5 a. However, the driver circuits 3 a and 3 b alternately operate in synchronism with each other. From the viewpoint of overall circuit operation stability, it is therefore preferred that the driver circuits 3 a and 3 b be formed within the same semiconductor chip.

Further, the low-side switch power MOSFET Q2 is formed in another semiconductor chip (second semiconductor chip), and then the semiconductor chips 5 a and 5 b are encased in a single package 6 a made of a resin sealing body. This ensures that the wiring inductance can be reduced. Further, the non-isolated DC-DC converter 1 can be reduced in size. If attention is paid on wiring inductance reduction only, it is preferred that the low-side switch power MOSFET Q2 be formed within the abovementioned semiconductor chip. However, since the high-side switch power MOSFET Q1 is formed by a horizontal power MOSFET while the low-side power MOSFET Q2 is formed by a vertical power MOSFET as described above, it is extremely difficult to form these different types of MOSFETs within the same semiconductor chip. Even if they can be formed within the same semiconductor chip, the production process is complicated so that the production takes a considerable amount of time while increasing the cost. Further, the low-side switch power MOSFET Q2 is likely to generate heat because it has a longer ON time than the high-side switch power MOSFET Q1 as described earlier. Therefore, if the low-side switch power MOSFET Q2 is formed within the same semiconductor chip as for the high-side switch power MOSFET Q1, it is anticipated that the heat generated during the operation of the low-side switch power MOSFET Q2 may adversely affect the high-side switch power MOSFET Q1 through a semiconductor substrate. As such being the case, the first embodiment forms the low-side switch power MOSFET Q2 in the semiconductor chip 5 b because the semiconductor chip 5 b is separate from the semiconductor chip 5 a in which the high-side switch power MOSFET Q1 is formed. This ensures that the production process for the non-isolated DC-DC converter 1 is easier than forming the high-side switch power MOSFET Q1 and low-side switch power MOSFET Q2 within the same semiconductor chip. Therefore, the production time and cost for the non-isolated DC-DC converter 1 can be reduced. Further, the operation stability of the non-isolated DC-DC converter 1 can be improved because the high-side switch power MOSFET Q1 is not adversely affected by the heat generated during an operation of the low-side switch power MOSFET Q2.

The configuration and features of a non-isolated DC-DC converter according to the present invention will now be described with reference to FIGS. 9 through 12.

In a non-isolated DC-DC converter 50A shown in FIG. 9, the driver circuits 3 a and 3 b, high-side switch power MOSFET Q1, and low-side switch power MOSFET Q2 are separately formed within semiconductor chips 5 c through 5 e and separately encased in packages 6 c through 6 e. When this configuration is employed, the voltage conversion efficiency decreases due to wiring inductance. Further, the overall size cannot be reduced.

In a non-isolated DC-DC converter 50B shown in FIG. 10, the driver circuits 3 a and 3 b, high-side switch power MOSFET Q1 (horizontal type), and a low-side switch power MOSFET Q50 (horizontal type) are formed within a single semiconductor chip 5 f and encased in a single package 6 f. In this configuration, which uses a single chip, the voltage conversion efficiency does not decrease due to wiring inductance. Further, the configuration is suitable for overall miniaturization. However, it is difficult to form different types of power MOSFETs within the same semiconductor chip 5 f as described earlier. For the use of a single chip, it is necessary to use a horizontal power MOSFET for forming both the low-side switch power MOSFET Q50 and the high-side switch power MOSFET Q1. The ON resistance of the power MOSFET Q50 then becomes great. It is therefore impossible to achieve high voltage conversion efficiency in response to a large-current output request. It is also anticipated that the heat generated by the low-side switch power MOSFET Q50 may adversely affect the high-side switch power MOSFET Q1 through a semiconductor substrate.

In a non-isolated DC-DC converter 50C shown in FIG. 11, the driver circuits 3 a and 3 b and high-side switch power MOSFET Q1 (horizontal type) are formed within a single semiconductor chip 5 g and encased in a package 6 g, and the low-side switch power MOSFET Q2 (vertical type) is formed within a semiconductor chip 5 h and encased in a package 6 h. In this configuration, the wiring inductance for the high-side switch power MOSFET Q1 can be reduced; however, the voltage conversion efficiency decreases because the wiring inductance and resistance for the low-side switch power MOSFET Q2 increase. Further, since the separate packages 6 g, 6 h are used for encasing, this configuration is not suitable for overall miniaturization.

In a non-isolated DC-DC converter 50D shown in FIG. 12, the driver circuits 3 a and 3 b, high-side switch power MOSFET Q1 (horizontal type), and low-side switch power MOSFET Q2 (vertical type) are formed within separate semiconductor chips 5 i, 5 j, 5 k, and these three semiconductor chips 5 i, 5 j, 5 k are encased in a single package 6 i. This configuration is ideally suited for overall miniaturization. However, since the frequency of the non-isolated DC-DC converter 50D is increased, wiring inductance LsH of the high-side switch power MOSFET Q1 is greater than in the configurations shown in FIGS. 10 and 11. As a result, this configuration decreases the voltage conversion efficiency.

FIG. 13 shows parameter comparisons of the non-isolated DC-DC converter 1 according to the first embodiment, which is shown in FIG. 8, and the non-isolated DC-DC converters 50A to 50D shown in FIGS. 9 through 12. The non-isolated DC-DC converter 1 according to the first embodiment is superior to the others particularly in wiring inductance reduction and miniaturization and better than the others in an overall sense as well.

A typical configuration of the non-isolated DC-DC converter 1 according to the first embodiment, which is shown in FIG. 8, will now be described in detail with reference to FIGS. 14 through 17.

FIG. 14 is a plan view illustrating a typical configuration of the package 6 a that contains a part of the circuitry for the non-isolated DC-DC converter 1. FIG. 15 shows cross section Y1-Y1 of FIG. 14. FIG. 16 shows an essential part cross section of the semiconductor chip 5 a, which is shown in FIG. 14. FIG. 17 shows an essential part cross section of the semiconductor chip 5 b, which is shown in FIG. 14. For enhanced drawing viewability, FIG. 14 excludes casing 8 over the semiconductor chips 5 a and 5 b, die pads 7 a 1 and 7 a 2, and leads 7 b. In addition, die pads 7 a 1 and 7 a 2 and leads 7 b are hatched.

The package 6 a according to the first embodiment, which is mentioned above, is, for instance, a QFN (Quad Flat Non-leaded package). However, various other packages may be used instead of a QFN. For example, a QFP (Quad Flat Package), SOP (Small Outline Package), or other similar flat package may be used. The package 6 a includes the two die pads (chip mounting members) 7 a 1, 7 a 2, the plurality of leads 7 b, a bonding wire (hereinafter abbreviated to a wire) WR, and a casing 8. The die pads 7 a 1, 7 a 2 and leads 7 b are made, for instance, of 42 Alloy or other similar metal. The wire WR is made, for instance, of gold (Au). The casing 8 is made, for instance, of epoxy resin.

The semiconductor chip 5 a is mounted on the die pad 7 a 1 with its main surface facing upward. The driver circuits 3 a and 3 b and high-side switch horizontal power MOSFET Q1 are formed on the main surface of the semiconductor chip 5 a as described earlier. A plurality of bonding pads (hereinafter abbreviated to pads) BP are mounted on the main surface of the semiconductor chip 5 a as external terminals for providing electrical connections to various circuit electrodes. Meanwhile, the low-side switch vertical power MOSFET Q2 is formed on the semiconductor chip 5 b. The plurality of pads BP are also mounted on the main surface of the semiconductor chip 5 b. Each of the pads BP is made, for instance, of aluminum or other similar metal.

The pads BP for the semiconductor chips 5 a and 5 b are electrically connected to various parts via the abovementioned wire WR. The pad BP1, which is used for the drain of the power MOSFET Q1 in the semiconductor chip 5 a, is electrically connected via a plurality of wires WR to lead 7 b 1, which is connected to the terminal ET1. A pad BP2, which is used for the source of the power MOSFET Q1 in the semiconductor chip 5 a, is electrically connected to the die pad 7 a 2 via a plurality of wires WR. A pad BP3, which is used as an output of the driver circuit 3 b in the semiconductor chip 5 a, is electrically connected via a wire WR to a pad BP4, which is used for the gate of the power MOSFET Q2 in the semiconductor chip 5 b. A pad BP5, which is used to supply the reference potential for the driver circuit 3 b of the semiconductor chip 5 a, is electrically connected via a wire WR to a pad BP6, which is used for the source of the power MOSFET Q2 in the semiconductor chip 5 b. The pad BP6, which is used for the source of the semiconductor chip 5 b, is electrically connected to a lead 7 b 2 (7 b) via a plurality of wires. The reference potential GND is supplied to the lead 7 b 2 via a terminal ET3. The back surface of the semiconductor chip 5 b serves as a drain electrode for the power MOSFET Q2 and is electrically connected to the die pad 7 a 2. The die pad 7 a 2 is electrically connected to a lead 7 b 3, which is integral with the die pad 7 a 2. A lead 7 b 3 is electrically connected to terminal ET4. The terminal ET4 is electrically connected to the aforementioned coil L1.

The semiconductor chips 5 a and 5 b and wires WR are enclosed in the casing 8; however, the back surfaces of the die pads 7 a 1 and 7 a 2 (the surfaces opposing the chip mounting surface) are exposed to the outside. The heat generated during an operation of the semiconductor chips 5 a and 5 b is radiated to the outside from the back surfaces of the semiconductor chips 5 a and 5 b via the die pads 7 a 1 and 7 a 2. This improves the heat radiation capability of the non-isolated DC-DC converter 1. When the structure described above is employed, both the back surfaces of die pads 7 a 1 and 7 a 2 (the surfaces opposing the surfaces on which the semiconductor chips 5 a and 5 b are mounted) and the back surfaces of leads 7 b (the surfaces opposing the surface to which the wires WR is connected and joining with the wiring board terminals) exist on the surface for mounting the package 6 a (the surface opposing the wiring board when the package 6 a is mounted on the wiring board).

FIG. 16 shows an essential part cross section of the semiconductor chip 5 a, which is mentioned above. The right-hand side of FIG. 16 shows a unit formation region QR1 of the power MOSFET Q1. The left-hand side of FIG. 16 shows a unit formation region DCR of the driver circuit 3 a. The power MOSFET Q1 in a unit region is shown in FIG. 16. In reality, however, a plurality of power MOSFETs Q1 exist to form a single power MOSFET Q1. Since the device structure of driver circuit 3 b is almost the same as that of driver circuit 3 a, driver circuit 3 b is not described herein.

A semiconductor substrate 10 a for the semiconductor chip 5 a is made of a p-type silicon (Si) single crystal. A p-well PWL and an n-well NWL are formed on its main surface. In the n-well NWL in the unit formation region QR1, an n-channel horizontal power MOSFET Q1 is formed. The power MOSFET Q1 includes an n+ source region SR1, an n+ drain region DR1, a p-type channel formation region CH1, a gate insulation film 11 a, and a gate electrode G1. A desired potential is supplied to the channel formation region CH1 via a p+ semiconductor region 12 a, which is formed on the front side of the channel formation region CH1. The current I1, which flows during an operation of the power MOSFET Q1 as described earlier, flows from the drain region DR1 toward the source region SR1 via the channel formation region CH1 and along the main surface of the semiconductor substrate 10 a. This horizontal power MOSFET Q1 has a smaller channel width per unit cell area than a vertical MOSFET, and exhibits a great ON resistance. However, it is possible to reduce the gate area per unit cell area and decrease the area of a joint between the gate electrode and drain drift layer. Therefore, the parasitic capacity between the gate and drain can be reduced.

The driver circuit 3 a (3 b), which is formed, for instance, by a CMOS (Complementary MOS) inverter circuit, is formed in the unit formation region DR1. The driver circuit 3 a (3 b) is formed by a p-channel horizontal power MOSFET Q3, which is formed in the n-well NWL in the formation area DR1, and an n-channel horizontal power MOSFET Q4, which is formed in the p-well PWL. The power MOSFET Q3 includes a source region SR3, a drain region DR3, a gate insulation film 11 a, and a gate electrode G3. The source region SR3 and drain region DR3 include a p− semiconductor region 13 a and a p+ semiconductor region 13 b. The power MOSFET Q4 includes a source region SR4, a drain region DR4, a gate insulation film 11 a, and a gate electrode G4. The source region SR4 and drain region DR4 include an n−semiconductor region 14 a and an n+ semiconductor region 14 b.

FIG. 17 is a cross-sectional view of a unit region of the power MOSFET Q2 in the semiconductor chip 5 b, which is described above. The power MOSFET Q2 in a unit region is shown in FIG. 17. In reality, however, a plurality of power MOSFETs Q2 exist to form a single power MOSFET Q2.

The semiconductor substrate 10 b for the semiconductor chip 5 b is made, for instance, of an n++silicon (Si) single crystal. On its back surface, the abovementioned drain electrode (external terminal) 17 for the power MOSFET Q2 is formed. The drain electrode 17 is formed, for instance, by vapor-depositing gold (Au) or other metal, and connected to the die pad 7 a 2 as described earlier. Meanwhile, an epitaxial layer 10bep, which is made of an n-type silicon single crystal, is formed on the main surface of the semiconductor substrate 10 b. In the epitaxial layer 10bep, three regions are formed. From bottom to top, the three regions are an n-type semiconductor region 18 n 1, a p-type semiconductor region 19 p, and an n+ type semiconductor region 18 n 2. In the semiconductor substrate 10 b and epitaxial layer 10bep, for example, a trench-gate-structured, n-channel vertical power MOSFET Q2 is formed.

The power MOSFET Q2 includes the abovementioned n+ type semiconductor region 18 n 2, which functions as the source region SR2; the abovementioned n-type semiconductor region 18 n 1, which functions as the drain region DR2; the abovementioned p-type semiconductor region 18 p, which functions as a channel formation region CH2; a gate insulation film 11 b, which is formed on the inner wall surface of a groove 19 that is made in the direction of the thickness of the epitaxial layer 10bep; and a gate electrode G2, which is embedded in the groove 19 via the gate insulation film 11 b. The gate electrode G2 is electrically connected to the pad BP4, which is used for the aforementioned gate. When a trench gate structure is employed as described above, it is possible to miniaturize and increase the density of a unit region of the power MOSFET Q2. A cap insulation film 20 is formed on the gate electrode G2 to provide insulation between the gate electrode and pad BP6, which is used for the source. The pad BP6 is electrically connected not only to the n+ type semiconductor region 18 n 2, which is used for the source, but also to the p-type semiconductor region 19 p, which is used for channel formation. The current 12, which flows during an operation of power MOSFET Q2 as described earlier, flows in the direction of the depth of the groove 19 (flows in the direction of the thickness of the drift layer). The vertical power MOSFET Q2, which is described above, has a larger gate area per unit cell area than the horizontal power MOSFET Q1. Further, the vertical power MOSFET Q2 has a large joint area between the gate electrode and drain drift layer. Therefore, the channel width per unit cell area can be increased although the parasitic capacity between the gate and drain increases. As a result, the ON resistance can be reduced.

FIG. 18 is a plan view illustrating, as an example, how the above package 6 a is mounted. FIG. 19 is a side view of the package shown in FIG. 18.

A wiring board 23 is, for instance, a printed wiring board. Packages 6 a, 24, 25 and chip parts 26, 27 are mounted on the main surface of the wiring board. In the package 24, the aforementioned control circuit 2 is formed. In the package 25, the aforementioned load circuit 4 is formed. In the chip part 26, the aforementioned coil L1 is formed. In the chip parts 27, the aforementioned capacitor C1 is formed. A lead 24 a of the package 24 is electrically connected to a lead 7 b of the package 6 a via a wire 28 a on the wiring board 23. The lead 7 b 1 of the package 6 a is electrically connected to a wire 28 b on the wiring board 23. The lead 7 b 3 of the package 6 a is electrically connected to one end of the coil L1 of the chip part 26 via a wire (output wire) 28 c on the wiring board 23. The other end of the coil L1 is electrically connected to the load circuit 4 via wire (output wire) 28 d on the wiring board 23. The lead 7 b 2, which is used for the reference potential GND of the wiring board 23, is electrically connected to one end of the capacitor C1 of a plurality of the chip parts 27 via a wire 28 e on the wiring board 23. The other end of the capacitor C1 is electrically connected to the load circuit 4 via a wire 28 d on the wiring board 23.

Second Embodiment

A second embodiment of the non-isolated DC-DC converter 1 according to the present invention will now be described. FIG. 20 is a plan view illustrating a typical configuration of the package 6 a including a part of the circuitry for the non-isolated DC-DC converter 1. FIG. 21 shows cross section Y1-Y1 of FIG. 20. For enhanced drawing viewability, FIG. 20 excludes part of the casing 8. In addition, the die pads 7 a 1 and 7 a 2 and leads 7 b are hatched.

In the second embodiment, the wiring used to connect the pads BP and various parts is partly changed from the wires WR to metal plate wires 30. More specifically, the pad BP1, which is used for the drain of the power MOSFET Q1 in the semiconductor chip 5 a, is electrically connected to the lead 7 b 1 via one of the metal plate wires 30. The pad BP2, which is used for the source of the power MOSFET Q1 in the semiconductor chip 5 a, is electrically connected to the die pad 7 a 2 via a metal plate wire 30. The pad BP6, which is used for the source of the semiconductor chip 5 b, is electrically connected to lead 7 b 2 (7 b) via one of the metal plate wires 30. Each of the metal plate wires 30 is made of copper (Cu), aluminum (Al), or other similar metal, and electrically connected to a pad BP or lead 7 b via a bump electrode 31. The bump electrode 31 is made, for instance, or solder, gold (Au), or other similar metal. Conductive resin may be used instead of the bump electrode 31. The metal plate wires 30 are entirely covered with the casing 8.

In the second embodiment, the metal plate wires 30 are used instead of the wires WR so that the inductance parasitic on the wiring path can be further decreased. Thus, the switch loss can be further reduced. As a result, the voltage conversion efficiency of the non-isolated DC-DC converter 1 can be further enhanced.

Third Embodiment

A third embodiment of the non-isolated DC-DC converter 1 according to the present invention will now be described. FIG. 22 is a plan view illustrating a typical configuration of the package 6 a including a part of the circuitry for the non-isolated DC-DC converter 1. FIG. 23 shows cross section Y1-Y1 of FIG. 22. For enhanced drawing viewability, FIG. 22 excludes part of the casing 8. In addition, the die pads 7 a 1 and 7 a 2 and leads 7 b are hatched.

In the third embodiment, the wiring used to connect the pads BP and various parts is partly changed from the abovementioned wires WR to ribbon wires 33. The connections of the ribbon wires 33 are not described herein because they are the same as those of the metal plate wires 30, which are used in the second embodiment. The ribbon wires 33 are made, for instance, of copper (Cu), aluminum (Al), or other similar metal as is the case with the aforementioned metal plate wires 30. However, the ribbon wires 33 are thinner and more flexible than the metal plate wires 30. The ribbon wires 33 are entirely covered with the casing 8. The ribbon wires 33 are compressed, for instance, by using ultrasonic waves before being mounted. However, an alternative mounting method may be used. For example, the ribbon wires 33 may be mounted through the use of copper (Cu), solder, or conductive resin.

In the third embodiment, the ribbon wires 33 are used instead of the wires WR so that the inductance parasitic on the wiring path can be decreased. Thus, the switch loss can be further reduced. As a result, the voltage conversion efficiency of the non-isolated DC-DC converter 1 can be further enhanced.

Further, the use of the ribbon wires 33 in the third embodiment provides a higher degree of freedom in joining than in the second embodiment. When the semiconductor chips 5 a and 5 b are mounted on the die pads 7 a 1 and 7 a 2, the mounting positions of the semiconductor chips 5 a and 5 b may slightly vary from one mounting process to another. In such an instance, the pad-to-lead distance may vary. If the metal plate wires 30 are used as described in conjunction with the second embodiment, such distance variations may not always be handled properly. However, when the ribbon wires 33, which are softer than the metal plate wires 30, are used, the curvature of the ribbon wires 33 can be varied to properly handle the above distance variations. As a result, the joining reliability and the yield can be both increased.

Fourth Embodiment

Heat generation during an operation is another problem caused when the current and frequency of a DC-DC converter are increased. In the configuration employed by the first, second, or third embodiment, high heat radiation capability is required because two semiconductor chips 5 a, 5 b are encased in a single package 6 a. A fourth embodiment of the present invention will now be described with reference to heat radiation capability.

FIG. 24 is a cross-sectional view of the package 6 a according to the fourth embodiment. In the fourth embodiment, the leads 7 b are formed in a manner reverse to that for the leads 7 b in the first to third embodiments. When such a structure is employed, the back surfaces of the die pads 7 a 1 and 7 a 2 (the surfaces opposing the surface on which the semiconductor chips 5 a and 5 b are mounted) are exposed out of the upper surface the package 6 a, and the back surfaces of leads 7 b (the surface for joining with the wiring board terminals) are exposed out of the surface for mounting the package 6 a.

FIG. 25 is a cross-sectional view illustrating, as an example, how the package 6 a shown in FIG. 24 is mounted on the wiring board 23. The leads 7 b on the back surface (mounting surface) of the package 6 a are joined to the terminals on the wiring board 23 via solder or other similar adhesive material 35. A radiation fin (heat sink) 37 is joined to the upper surface of the package 6 a, that is, the back surfaces of the die pads 7 a 1 and 7 a 2, via silicone rubber sheet or other similar insulation sheet 36 that exhibits high thermal conductivity. When the configuration described above is employed, the heat generated by the semiconductor chips 5 a and 5 b propagates from the back surfaces of the semiconductor chips 5 a and 5 b to the radiation fin 36 via the die pads 7 a 1 and 7 a 2, and then becomes dissipated. This ensures that high heat radiation capability can be obtained even when the current and frequency of the non-isolated DC-DC converter 1 are increased within a configuration in which two semiconductor chips 5 a, 5 b are contained in a single package 6 a. Although an air-cooled heat sink is illustrated herein, an alternative is to use a liquid-cooled heat sink that has a flow path for flowing a cooling liquid to a radiator.

Fifth Embodiment

A fifth embodiment of the present invention will now be described with reference to an example of a modified version of the heat radiation scheme that has been described above.

FIG. 26 is a plan view illustrating a typical configuration of the package 6 a including a part of the circuitry for the non-isolated DC-DC converter 1, which has been described in conjunction with another embodiment. FIG. 27 shows cross section Y1-Y1 of FIG. 26. For enhanced drawing viewability, FIG. 26 excludes part of the casing 8. In addition, the die pads 7 a 1 and 7 a 2, leads 7 b, and metallic bodies 40 are hatched.

In the fifth embodiment, the metallic bodies 40 are joined to the main surfaces of the semiconductor chips 5 a and 5 b. The metallic bodies 40 are partially exposed out of the casing 8. The metallic bodies 40 are made, for instance, of copper, aluminum, or other metal that exhibits high thermal conductivity, and joined to a dummy pad BP7 for the semiconductor chip 5 a and the source pad BP6 for the semiconductor chip 5 b via adhesive 41, which is made, for instance, of solder or conductive resin. The metallic bodies 40 are positioned so as to particularly cover the formation regions for the power MOSFETs Q1 and Q2, which are the heat generation sources in semiconductor chips 5 a and 5 b. When the configuration described above is employed, the heat generated by the semiconductor chips 5 a and 5 b is not only radiated from the back surfaces of the semiconductor chips 5 a and 5 b toward the wiring board via die pads 7 a 1 and 7 a 2, but also radiated from the main surfaces of the semiconductor chips 5 a and 5 b to the outside via the metallic bodies 40. This ensures that high heat radiation capability is obtained. The heat radiation capability can be further enhanced by mounting a radiation fin 37 on the upper surface of package 6 a as described in conjunction with the fourth embodiment and joining the radiation fin 37 to the exposed surface of the metallic bodies 40. The dummy pad BP7 is positioned so as to cover the formation region of the power MOSFET Q1. It is preferred that the dummy pad BP7 be electrically connected to the circuitry within the semiconductor chip 5 a for heat radiation capability enhancement. To avoid a short circuit, however, such an electrical connection should not be made. When such an electrical connection is not made, the dummy pad BP7 is mounted, for instance, via an insulation board.

Sixth Embodiment

A sixth embodiment of the present invention will now be described with reference to an example of a modified version of the heat radiation scheme that has been described earlier.

FIG. 28 is a plan view illustrating a typical configuration of the package 6 a including a part of the circuitry for the non-isolated DC-DC converter 1, which has been described in conjunction with another embodiment. FIG. 29 shows cross section Y1-Y1 of FIG. 28. FIG. 30 is a plan view illustrating the upper surface of the package 6 a shown in FIG. 28. FIG. 31 is a plan view that illustrates the upper surface of the package 6 a in order to indicate a typical modified version of FIG. 30. For enhanced drawing viewability, FIG. 28 excludes part of the casing 8. In addition, the die pads 7 a 1 and 7 a 2 and leads 7 b are hatched.

In the sixth embodiment, the wiring used to connect the pads BP and various parts is partly changed from the aforementioned wires WR to the metal plate wires 30 as is the case with the second embodiment. Further, the metal plate wires 30 are partly exposed out of the casing 8. The metal plate wires 30 are positioned so as to particularly cover the formation regions of the power MOSFET Q1 and Q2, which are the heat generation sources of the semiconductor chips 5 a and 5 b. In FIGS. 28 through 30, the metal plate wires 30 on both sides of the semiconductor chips 5 a and 5 b are exposed out of the upper surface of the package 30. However, an alternative configuration may be employed, as indicated in FIG. 31, so as to expose only the metal plate wire 30 for semiconductor chip 5 b in which low-side switch power MOSFET Q2 (which exhibits a relatively great heat release value) is formed. In the sixth embodiment, too, the heat radiation capability can be further enhanced by mounting the radiation fin 37 on the upper surface of the package 6 a as described in conjunction with the fourth embodiment and joining the radiation fin 37 to the exposed surface of the metal plate wire 30.

The sixth embodiment incorporates the heat radiation function of the metal plate wiring 30 in addition to the functions that are provided by the second and fifth embodiments. Therefore, the sixth embodiment does not require the addition of any other heat radiation parts. Consequently, the number of assembly process steps for the package 6 a can be rendered smaller than when the fifth embodiment is used. Thus, the assembly time required for the package 6 a can be reduced. As a result, the cost of a semiconductor device can be decreased.

While the present invention has been described in conjunction with the preferred embodiments of the present invention, persons of skill in the art will appreciate that variations may be made without departure from the scope and spirit of the invention.

In the foregoing embodiments, a flat package structure is illustrated as the package structure. However, the present invention is not limited to the use of a flat package structure. For example, a BGA (Ball Grid Array) package structure may be alternatively used.

In the foregoing embodiments, a power MOSFET is illustrated as a DC-DC converter, which is widely used as a power supply circuit. However, the present invention is not limited to the use of such a power MOSFET. For example, an alternative is to use a power MISFET (Metal Insulator Semiconductor Field Effect Transistor) structure in which insulation film is used in place of oxide film.

In the foregoing embodiments, the illustrated power MOSFET uses a gate electrode made of metal. However, the present invention is not limited to the use of a gate electrode made of metal. For example, an alternative is to use a structure in which polycrystalline silicon (poly-Si) is used instead of metal.

Although the present invention has been described with reference to a case where the present invention is applied to a power supply circuit for driving a CPU or DSP, the present invention can also be applied to various other power supply circuits, including a power supply circuit for driving a circuit other than a CPU and DSP.

The present invention can be applied to the manufacture of a semiconductor device. 

1. A semiconductor device comprising: a resin sealing body; a first power supply terminal that is exposed out of said resin sealing body to supply a first power supply potential; a second power supply terminal that is exposed out of said resin sealing body to supply a second power supply potential, which is lower than said first power supply potential; a control terminal that is exposed out of said resin sealing body to supply a control signal; an output terminal that is exposed out of said resin sealing body; a first field effect transistor whose source-drain path is series-connected between said first power supply terminal and said output terminal; a second field effect transistor whose source-drain path is series-connected between said output terminal and said second power supply terminal; a first control circuit that is connected to said control terminal to control a gate electrode of said first field effect transistor with said control signal; and a second control circuit that is connected to said control terminal to control a gate electrode of said second field effect transistor with said control signal, wherein said first field effect transistor and said first control circuit are formed by a first semiconductor chip; wherein said second field effect transistor is formed by a second semiconductor chip, which differs from said first semiconductor chip; and wherein said first semiconductor chip and said second semiconductor chip are sealed in said resin sealing body.
 2. The semiconductor device according to claim 1, wherein said first semiconductor chip is provided with said second control circuit, which controls the gate electrode of said second field effect transistor.
 3. The semiconductor device according to claim 1, wherein said first field effect transistor comprises a semiconductor substrate that includes a first main surface and a second main surface opposing to said first main surface; a gate insulation film that is formed on said first main surface of said semiconductor substrate; a gate electrode that is formed on said gate insulation film; source and drain semiconductor regions that are formed on said first main surface and both sides said gate electrode; and a channel formation semiconductor region that is formed on said first main surface, formed beneath said gate electrode and between said source and drain semiconductor regions.
 4. The semiconductor device according to claim 1, wherein the ON resistance of said second field effect transistor is smaller than the ON resistance of said first field effect transistor.
 5. The semiconductor device according to claim 4, wherein the ON time of said second field effect transistor is longer than the ON time of said first field effect transistor.
 6. The semiconductor device according to claim 1, wherein a diode is formed on said second semiconductor chip; an anode of said diode is electrically connected to a source of said second field effect transistor; and a cathode of said diode is electrically connected to a drain of said second field effect transistor.
 7. The semiconductor device according to claim 1, wherein said first semiconductor chip is mounted on a first chip mounting member; wherein said second semiconductor chip is mounted on a second chip mounting member; and wherein said first chip mounting member and said second chip mounting member are partially exposed out of said resin sealing body.
 8. The semiconductor device according to claim 1, wherein the main surfaces of said first semiconductor chip and said second semiconductor chip are provided with a metallic body, which is partially exposed out of said resin sealing body.
 9. The semiconductor device according to claim 8, wherein said metallic body is electrically connected not only to electrodes of said first semiconductor chip and said second semiconductor chip but also to leads.
 10. The semiconductor device according to claim 1, wherein a series circuit between said first field effect transistor and said second field effect transistor is a part of a DC-DC converter.
 11. A semiconductor device comprising: a first semiconductor chip in which a high-side switch power transistor is formed; and a second semiconductor chip in which a low-side switch power transistor is formed, the low-side switch power transistor being series-connected to said high-side switch power transistor, wherein said first semiconductor chip and said second semiconductor chip are contained in the same resin sealing body; wherein said first semiconductor chip is provided with a drive circuit for driving said high-side switch power transistor; and wherein said high-side switch power transistor is formed by a horizontal power MOSFET, and said low-side switch power transistor is formed by a vertical power MOSFET.
 12. The semiconductor device according to claim 11, wherein said first semiconductor chip is mounted on a first chip mounting member; wherein said second semiconductor chip is mounted on a second chip mounting member; and wherein said first chip mounting member and said second chip mounting member are partially exposed out of said resin sealing body.
 13. The semiconductor device according to claim 11, wherein main surfaces of said first semiconductor chip and said second semiconductor chip are provided with a metallic body, which is partially exposed out of said resin sealing body.
 14. The semiconductor device according to claim 13, wherein said metallic body is electrically connected not only to electrodes of said first semiconductor chip and said second semiconductor chip but also to leads.
 15. The semiconductor device according to claim 6, wherein wiring between a source of said first field effect transistor and the drain of said second field effect transistor is electrically connected to output wiring of said power supply circuit; wherein, (a) when said first field effect transistor turns ON, a first current flows from said first power supply potential, which is electrically connected to the drain of said first field effect transistor, to said output wiring via said first field effect transistor; (b) wherein, when said first field effect transistor turns OFF, a second current flows from said second power supply potential, which is electrically connected to the source of said second field effect transistor, to said output wiring via said diode; and wherein, (c) when said second field effect transistor turns ON, a third current flows from said second power supply potential to said output wiring via said second field effect transistor.
 16. The semiconductor device according to claim 1, wherein said second field effect transistor comprises a semiconductor substrate that includes a first main surface and a second main surface opposing to said first main surface; a groove that is formed from the first main surface to the second main surface of said semiconductor substrate; a gate insulation film that is formed on an inner wall surface of said groove; a gate electrode that is formed on said gate insulation film; a source semiconductor region that is formed on said first main surface and both sides said gate electrode; a channel formation semiconductor region that is formed on a side surface of said gate electrode and formed between said source and drain semiconductor regions; and a drain semiconductor region that is formed on said second main surface. 